@article{PB-632D543FB03AE5F0B42A,
  title = {Ultra-wide-field imaging Mueller matrix spectroscopic ellipsometry for semiconductor metrology},
  author = {Juntaek Oh and Jaehyeon Son and Changhyeong Yoon and Eunsoo Hwang and Jinwoo Ahn and Jaewon Lee and Jinsoo Lee and Jiyong Shin and Donggun Lee and Seunga Lim and Jeongho Ahn and Younghoon Sohn and Sangjin Hyun and Myungjun Lee and Taeyong Jo},
  journal = {Nature Communications},
  year = {2025},
  doi = {10.1038/s41467-025-63511-1}
}