@article{PB-5241A297671653DCA90D,
  title = {Deep Learning Enabled Spatially Polarization Modulated Mueller Matrix Ellipsometer},
  author = {Jianyu Weng and Chao Gao and Bing Lei},
  journal = {IEEE Transactions on Instrumentation and Measurement},
  year = {2023},
  doi = {10.1109/tim.2023.3316248}
}